Model name

SR67A-×××○□AX

SR67A-×××○□BX
SR67A-×××○□DX

SR67A-×××○AZY

Effective length (L: mm)

140 - 3,640

Thermal expansion coefficient

12±１ × 10^-6/ ℃

Accuracy(at 20℃)

3+3L/1,000 μmp-p (effective length 140 to 3,040 mm) or 5+5L/1,000 μmp-p (effective length 140 to 3,640 mm),
L: Effective length (mm)

Reference point

Center, or user-selected position(Set at
factory shipping)

Fixed to center

Fixed to 10 mm from left end of
effective length

Output signal

Absolute serial bidirectional signal, compliant with EIA-485

Compliant with DRIVE-CLiQ

Compatible controllers

FANUC αi interface compatible

Mitsubishi Electric

SIEMENS AG

Resolution

Selectable from 0.01, 0.05, 0.1, 0.5 and 1
μm (Set at factory shipping)

Selectable from 0.01, 0.05 and 0.1
μm (Set at factory shipping)

0.01μｍ

Maximum response speed

200 m/min

Functional safety

Please consult with each controller manufacturer regarding support for
functional safety.

EN ISO13849-1:2008 Cat.3
EN 62061:2005 / IEC 61508:2010
EN61800-5-2:2007

Legal compliance

FCC Part15 Subpart B Class A
ICES-003 Class A Digital Device
EN55011 Gp1 Class A, EN61000-6-2

Operating temperature range

0 to +50℃

Storage temperature range

-20 to +55℃

Vibration resistance

250 m/s² (50 Hz to 2 kHz)

Impact resistance

450 m/s² (11 ms)

Protective design grade

IP54 (Air purge not included), IP65 (Air purge included)

Power supply voltage range

DC+4.75 to +5.25 V

DC+17 to +30.8 V

Maximum power consumption

1.3W or less (4.75V or 5.25V)

1.75W or less (17V)
1.9W or less (30.8V)

Consumption current

250mA (5V) (when the controller is connected)

75mA (24V) (when the controller is
connected)

Mass

Approx. 0.9kg+ 5.2kg/m or less

Compatible cables
(types without relay
connectors)
Maximum cable length

CH23-***NVF
13 ｍ

CH23-***NVM
13 m

CH22-***NSMY
30 ｍ

Compatible cables
(types with relay connectors)
Maximum cable length

CH23-***NVK + CH23-***NPFA
30 ｍ

CH23-***NVK + CH23-***NPMA
30 ｍ

CH22-***NSMF + CH22-*** NSFY
30 ｍ